As transistors shrink and stacks become 3D, visible light can no longer resolve what's inside. At Invisix, we shrink the wavelength of illumination to extend Moore's law.
As advanced 3D devices outpace the limits of optical metrology, we extend measurement into the soft x-ray regime matching the wavelength of our tools to the true scale of the structures themselves.
A single, closed pipeline from photon to process-control signal, built for high-volume manufacturing.
Our products facilitate online process control in high volume:
3D profile metrology
Device Pitch Overlay
Unpatterned Film Stack Characterization
Chips are like 200 story miniature skyscrapers, built one floor at a time. Metrology with enough resolution to see inside the building is needed at every floor. Visible light has run out of steam. By shrinking the wavelength, Invisix brings the future into focus
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More information content. More actionable intelligence. More yield.